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CPS Charged particle integrated power supply
The CPS series is designed specifically for charged particle sources such as electron guns and ion sources. Integrated multi-channel precision stable high-voltage power supply, providing high stable acceleration voltage from 1kV to 30kV, as well as floating filament, suction pole, and suppression pole outputs. Suitable for charged particle sources such as field emission electron sources, cold cathode electron sources, and gallium ion sources for FIB. This series of products has low ripple and excellent stability, ensuring stable electronic and ion sources. The product adopts an open architecture, which facilitates OEM manufacturers' independent development and single module maintenance.
Specifications
| CPS-E20P10 Specifications | Accelerating voltage | Filament current | Absorbing Extreme | Inhibition pole |
|---|---|---|---|---|
| Voltage range | 0~-20kV | ≤3V | 0~+10kV | 0~-2.5kV |
| Maximum current | 500μA | 4 A | 1mA | 4 mA |
| Relative load adjustment rate | ＜10 ppm | ＜1mA | ＜10 ppm | ＜10 ppm |
| Relative linear adjustment rate | ＜10 ppm | ＜1mA | ＜10 ppm | ＜10 ppm |
| Ripple | ＜2 ppm | ＜1mA | ＜2 ppm | ＜4 ppm |
| Temperature coefficient | ＜10 ppm/℃ | -- | ＜10 ppm/℃ | ＜10 ppm/℃ |
| Stability(1h) | 10ppm | 500ppm | 10 ppm | 10 ppm |
| Slope rate range | 1~20000 V/s | 1~3000 mA/s | 1~10000 V/s | 1~2500 V/s |
| Voltage monitoring resolution | 0.1 V | -- | 0.1 V | 0.1 V |
| Resolution of current monitoring | 0.1 uA | 1 mA | 0.1 uA | 0.1 uA |
Reference location: Acceleration voltage
Reference acceleration voltage: filament current, suction electrode, suppression electrode